Counter operation in nonlinear micro-electro-mechanical resonators

Micro - Electro - Mechanical - Systems ( Mems )

Bandwidth-tunable add-drop filters based on micro-electro-mechanical-system actuated silicon microtoroidal resonators.

A bandwidth-tunable filter has been demonstrated based on a micro-electro-mechanical-system (MEMS) actuated single-crystalline silicon microtoroidal resonator. Bandwidth is tuned from 2.8 to 78.4 GHz by voltage control, the largest bandwidth tuning range reported to date to our knowledge in resonator-based filters. A 21.8 dB extinction ratio is attained as a dynamic add-drop filter.

Modelling, control and simulation of a micro electro-mechanical actuator (MEMS) for micro-gripper operation in DNA manipulation

This project deals with the modelling, control and simulation of a micro electro-mechanical actuator for micromechatronical tweezers in DNA-manipulation processes. I. THE MICRO-MECHATRONICAL PROCESS The manipulation of biological molecules by using micromechanical and optical devices such as: magnetic tweezers [1], [2], optical tweezers [3], AFM cantilevers [4] and microfibers [5], [6], are now...

Generalized Theory of Electro-Mechanical Resonators with Fractal Electrodes

In this paper, we study the operation of electrostatically actuated electromechanical resonators having fractal electrodes. Using the spring-mass model, we establish the scaling relationships for pull-in instability , voltage dependent resonance frequency 1 , and pull-in voltage , where is the fractal dimension of the electrode, is the air-gap, and are the resonance frequency at zero and applie...

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...